EG / EL-610series

EG_EL-610
Ozone gas/water analyzer for semiconductors
for ozone gas: Model EG-
for dissolved ozone: Model EL-

Freely installation by separating the detector and controller.
Improve trackability of the concentration by continuous measurement.
EG-610_SH_specification »

EG-610_SH5_specification »

EG-610_SM_specification »

EL-610_SM_specification »

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